piezoelectric pump microfluidics

back pressure 80 mbar @300 Hz, 250 Vpp, SRS signal, typ. It was measured at 20, 40, and 60s. We took the average as the net flow rate and calculated the error bar. The initial waveform was a sinusoidal waveform with noise but became a smooth waveform curve after 0.05Hz FFT (Fast Fourier Transformation) lowpass filtering. (A8), Therefore, the coefficient of energy loss in the contracting direction and that in the expanding direction can be expressed as follows: (A9) e=(11)(12)(14+K)(15)/(1+K)(A9) (A10) c=(11)(15)(12)(KK4+2)/(2+K).(A10). The direction of polarization of the ceramic disc is along the length. Then their flow field was simulated through the same method and setting as above. Figure 16. After that, the double-loop tubes were connected with a pump chamber to realize the recirculation of fluid in the loop. Figure 17. [16], Among other applications, the following fields can be named: dosage systems for small quantity of lubricants, fuel dosing systems, micro pneumatics, micro hydraulic systems and dosage systems in production processes, liquid handling (cushion pipettes, microliter plates).[45]. Application of the Fraunhofer EMFT piezoelectric micropump reduces reaction time of the sensor up to 2 seconds through fast sampling of the ambient air. When x is c, it indicates that the fluid flows in the contracting direction; when x is e, the fluid flows in the expanding direction. Afterwards, under the excitation voltage of 100V RMS (effective voltage), the performances of six pumps were tested. Since the compressibility of the gases is challenging, the micropump must possess high compression ratio. Meanwhile, an oscilloscope (DSO-X2004A, Keysight, Santa Rosa, CA, USA) was used to monitor the actual working voltage, current, and frequency of the piezoelectric vibrator. The output power of a pump can be expressed as the product of flow rate and output pressure. Therefore, the energy loss difference drives the fluid pumping in a single direction during the pumping cycle. Finally, the motion trajectory of the microsphere at this time was captured by a high-speed camera and directly reflected the flow field. First, 5g of silicon carbide powder (with a diameter of 1m and a density of 3.20g/cmm3) were added to 1 L of deionized water in a beaker. Konrad-Adenauer-Allee 11 Register to receive personalised research and resources by email. The subscript x represents the direction of the fluid flow. Pump C (d=2.5mm) had a maximum value of 145m at 8Hz. A valve-less piezoelectric micropump generating recirculating flow (VPMGRF) was proposed for the first time and the performance was successfully verified in this paper. s and a density of 997kg/m3. The circles marked in A1 represent the initial position of the microsphere and the circles in different colors represent the microspheres at different locations in the tube. Therefore, the vibrator appeared to arch up and the deformed surface was near a rotating paraboloid. Table 5. Velocity vector on x-y plane of double-loop tube. [12] Mechanical systems contain moving parts, which are usually actuation and microvalve membranes or flaps. The current alternative to the micropump the fan has numerous drawbacks. FAX +1 508 983 1401. From Equation (3), we know that the change in the square cross section size has a greater influence on the rectification effect in the expanding direction, compared with that of a circular cross section. As shown in Figure6(a), during the suction process, the vibrator is moving upwards, the pump chamber is expanding, and the external fluid is inhaled through double-loop tubes. Moreover, we can conclude that fluid in the side passage flowed towards the expanding direction macroscopically. This will intensify the shear stress in the fluid layer, which results in obvious energy loss. With the function of rectification, double-loop tubes can be regarded as valve bodies with nonmoving parts. The system ensures an appropriate dose of the scent to be detected by the user only as soon as scent molecules are delivered. The diameter of the pump chamber is 27mm and the depth of pump chamber is 0.8mm. [18] Advantage of the micropump lies in the possibility to smell sequence of scents without different odors being mixed. Variable flow rate adjustment guarantees a wide range of possible applications. From the above simulation results, it can be concluded that a double-loop tube provides the function of rectification. Moreover, the distance between the chamber outlet and the chamber center is 2mm, and the radius of the bent tubes is 2.5mm. Experimental setup for the flow field during a pumping cycle. To make sure that the flows in different directions have the same initial velocity, the liquid level difference was set to 10cm. Comparing the pumps with different cross section characteristic length of double-loop tubes, we saw that the larger the section length, the smaller the net flow rate. In general, valve bodies can be classified into those with moving parts (Bao et al., 2019; Carrozza et al., 1995; Dong et al., 2017; Feng & Kim, 2004; L. He et al., 2020; J. W. Kan et al., 2005; Nguyen & Truong, 2004; Zeng et al., 2016) and those with nonmoving parts. Result of the flow characteristics when fluid flow through double-loop tube (As shown in video 1 in the attachment). Artificial sphincter technology based on the titanium micropump ensures continence by automatically adjusting the pressure during laughter or coughing. However, on the whole, the frequency corresponding to the maximum amplitude of vibrator, net flow rate, and amplitude of output pressure was approximately in agreement. It was obvious that the larger the characteristic length, the greater the amplitude of pressure. Piezoelectric MEMS micropumps can replace traditional peristaltic or syringe pumps for intravenous, subcutaneous, arterial, ocular drug injection. Cited by lists all citing articles based on Crossref citations.Articles with the Crossref icon will open in a new tab. With the surroundings restrained, the vibrator will arch up or press down when applied with excitation. The fluid passing through the side passage during the suction process will flow through the middle passage during the discharge process. Figure 13. To learn about our use of cookies and how you can manage your cookie settings, please see our Cookie Policy. Consequently, the following relationships can be obtained: (A4) u1=u9(A4) (A5) u2=u3u4=u5u6=u7u6=Ku4u7=Ku5(A5) (A6) u2=u3u4=u5u6=u7u8=Ku6=Ku7,(A6) where K and K are dimensionless constants. As the pumping goes on, the movement trajectory and direction of microspheres are shown by the curves with arrows. The dimensional parameters are shown in Table2. As a result, during a pumping cycle, VPMGRF will generate recirculating flow in the partial passage of the double-loop tube, as shown in Figure6(c). Afterwards, the piezoelectric vibrator was applied with the same voltage excitation as before. So, selecting a smaller characteristic length is beneficial to increase the velocity of the fluid in the tube, which can bring about a better rectification effect. The voltage was in the range of 100150V (peak value). Dortmund D-44263 This is the function of the rectification mentioned in Section 2.2.1. Did you know that with a free Taylor & Francis Online account you can gain access to the following benefits? The check valves on both sides of the pump chamber define the flow direction. Dialysis Apparatus With their small dimensions and low weight, our micropumps are already equipped for many fields. First, 5g of polystyrene microspheres (density: 1.06g/cmm3; diameter: 10m) were added to a beaker with deionized water and a glass rod was used to stir in one direction to mix them well. However, there are still many problems that deserve further investigation. From Section 2.2.1, we know that the rectification of the double-loop tube is mainly based on the inertia of the fluid. Table 4. As the cross-sectional area increases, the fluid is subjected to less resistance and it causes lower energy loss. For this pump, there is a dedicated controller or driver that is required to operate this pump: We do also have a pump with a built-in driver available: Note: Details such as specifications, etc., may be changed without notice. To simplify the flow model, unsteady NavierStokes equations were used to deal with a steady model invariant over time, based on the Reynolds-averaged NavierStokes (RANS) model. It can achieve fluid flow from different directions along various flow paths, which plays a role in diverting the flow to a specific passage. We also explored the effects of voltage and frequency on output performances. With only a few exceptions, micropumps rely on micro-actuation principles, which can reasonably be scaled up only to a certain size. In addition, it can also be explained from the perspective of energy consumption. It should be noted that ce. When the excitation source applied to vibrator is constant, the greater the output pressure, the smaller the flow rate. The vibrators can provide kinetic energy for a fluid, so an extra height difference between inlet and outlet was not needed. In addition, there was a slight difference in the excitation frequency corresponding to the maximum amplitude of vibrator, net flow rate, and amplitude of output pressure. 0 This process is repeated to pump fluid continuously. Thanks to MEMS fabrication technology, gas sensors based on MOS, NDIR, electrochemical principles could be miniaturized to fit portable devices as well as smartphones and wearables. VPMGRF could generate an internal recirculating flow and had a unidirectional pumping effect on the macro level. Glass capillaries and porous media, including nitrocellulose paper and synthetic paper,[23] can be integrated into microfluidic chips. The suction and discharge processes will form a pumping cycle. When the membrane is deflected upwards through some driving force, fluid is pulled into the inlet valve into the main pump valve. By comparing the pumps with different cross section shapes of double-loop tubes, it can be concluded that the pumps with circular cross section double-loop tubes performed better in terms of the flow rate. A diaphragm micropump uses the repeated actuation of a diaphragm to drive a fluid. Figure13 is the amplitude measuring result on the surface of the vibrator. V to enhance the effect of with ubiquitous picture scenarios (movies) and sound scenarios (music). [41] Chemically powered micropumps also demonstrate potential for applications in chemical sensing in terms of detecting chemical warfare agents and environmental hazards, such as mercury and cyanide.[30]. Its net flow rate could reach a maximum value of 5.19mL/min. Figure15 shows the results of net flow rate over time. Openings of the passive flap valves at the inlet and outlet are oriented according to the flow direction. Static valves are defined as valves which have fixed geometry without any moving parts. The membrane is positioned above a main pump valve, which is centered between inlet and outlet microvalves. Moreover, it was more obvious in the expanding direction than in the contracting direction. A piezoelectric element drives this micro diaphragm pump. TEL +81 52 891 2301 Table 6. Consequently, there is the following relationship: (10) E0=E,(10) where E0 is the kinetic energy of the fluid and is the energy conversion efficiency in the case of fluidstructure interaction. Generally, it is not on the same order of magnitude as the energy loss at the bifurcation and, thus, can be ignored. Measurement of net flow rate over time. These valves provide flow rectification through addition of energy (active) or inducing desired flow behavior by fluid inertia (passive). In this paper, the concept of a highly integrated valve-less piezoelectric micropump generating internal recirculating flow (VPMGRF) was proposed. Since it is easy to break down piezoelectric ceramics and cause crack damage by using higher exciting voltage, the driving voltage was in the range of 200300V (peak-to-peak value). Thus, the rectification effects of fluid in a different direction can be obtained as shown in Tables3 and 4. to facilitate full immersion in the desired environment. Nagoya, Aichi 458-8522, Japan Such pumps are of special interest in microfluidic research, and have become available for industrial product integration in recent years. Before applying power excitation, the liquid level of the two beakers was the same and both of them held deionized water with a dye that does not spread easily. Therefore, it is a real cost wonder! Considering contemporary state of air pollution one of the most promising applications for micropump lies in enhancement of gas and particulate matter sensors for monitoring personal air quality. Structure of VPMGRF. Structural parameters of piezoelectric vibrator. Different cross section shapes and characteristic lengths had an influence on its rectification. After obtaining the output performance of VPMGRF, we had to further verify the ability to generate recirculating flow. Microdiaphragm pumps require compact drives that can provide a continuous flow and variable flow rates. At the bifurcation of each part, the cross-sectional area of the tube will mutate. By the resulting down stroke, the medium is being displaced out of the pump chamber below. Note 1: Details such as specifications, etc., may be changed without notice. Due to the small volumes per pumping cycle, high cycle rates up to the kHz-range are necessary to achieve high flow rates. Therefore, the flow paths of the fluid will reverse during the pumping cycle. In spite of this, there were some things in common between them. Micropumps having nozzle-diffuser elements as flow rectification device are commonly known as Valveless Micropumps. The nonmoving parts are based on the flow resistance mechanism to realize unidirectional fluid pumping macroscopically. However, the influence of the cross-sectional area on the rectification effect in the contracting direction is similar between the circular cross section and the square section according to Equation (4). To further explore the relationship between the fluid inertia and the rectification effect, six different sets of double-loop tubes with different cross section shapes and areas were designed. A peristaltic micropump is a micropump composed of at least three microvalves in series. The relation of pressure and flow rate is linear. Figure16 shows the results of net flow rate between pumps. Table 3. Produced almost entirely from plastic, our micropumps can be manufactured cost-effectively in high volumes. fmax and fmin are the maximum and minimum between (Q66)x and (Q88)x, respectively. [3][4] Although any kind of small pump is often referred to as micropump, a more accurate definition restricts this term to pumps with functional dimensions in the micrometer range. As shown in Figure6(b), during the discharge process, the vibrator is moving downwards, the pump chamber is compressed, and the fluid is pressed out from the pump chamber. 15 correspond to Parts A E, respectively. Figure11 shows the results of flow characteristics when the fluid flowed through the double-loop tube in different directions. Figure14 is the amplitude measuring result on the center of the vibrators surface between different pumps with different double-loop tubes. FAX +81 52 891 7386, (d/b/a Takasago Fluidic Systems) The fields of application for piezoelectric micropumps are in laboratory technology, medical technology, biotechnology, chemical analytics, and process technology, which require reliable metering of minute amounts of liquids and gases. Figure 12. valve flaps, do not exhibit wear and fatigue. Moreover, the outlet was also connected to a dynamic pressure sensor (HM90, HELM, Hamburg, Germany) through a T-junction and the output pressures were measured three times. Dimensional parameters of double-loop tubes. Figure 15. The micropump consists of three silicon layers, one of which as a pump diaphragm confines the pump chamber from above, while two others represent middle valve chip and bottom valve chip. Since MEMS micromachining technologies have appeared, such as deep reactive ion etching and electron beam lithography, it has become easy to achieve the miniaturization of microfluidic devices. The following results were obtained: The novel double-loop flow tube had the function of rectification. Rectification effect of fluid in the contracting direction. E-Mail: info@bartels-mikrotechnik.de, Microfluidic Chips for full systemic functionality, liquids: controlable flowrate 8 l/min up to 10.000 l/min, typ. Amplitude measuring results of different pumps: (a) Amplitude of vibrator over pumps with different circle cross-section tubes under a fixed voltage; (b) Amplitude of vibrator over pumps with different circle cross-section tubes under a fixed frequency; (c) Amplitude of vibrator over pumps with different square cross-section tubes under a fixed voltage; and (d) Amplitude of vibrator over pumps with different square cross-section tubes under a fixed frequency. Therefore, during the pumping process, the fluid would recirculate in the loop of double-loop tubes. Due to their compact dimensions and the low energy requirements of piezo elements, these metering devices are also suitable for lab-on-a-chip applications. Figure17 shows the instantaneous output pressure of pumps over time. The results of rectification between different groups of double-loop tubes are shown in Figure4. This phenomenon is due to the formation of Helmholtz discontinuity and vortexes, which verifies the theoretical analysis in Section 2.2. The connection between the structured wafer layers is realized by silicon fusion bond. The materials used make the micropumps remarkably versatile. Then the movement of these points were measured one by one. Registered in England & Wales No. Figure12 shows the results of observation of the flow field in VPMGRF. The material is either PPSU or PP. The right beaker had red dye added to it, while the left had black dye added. Piezoelectric pumps are composed of a piezoelectric actuator and valve body (Chen et al., 2020; Kaynak et al., 2016; Li et al., 2021; J. T. Mohith et al., 2019; Opekar et al., 2016; Tang et al., 2019; Valdovinos et al., 2014; Wang et al., 2019; Y.-N. Wang & Fu, 2018; Yin et al., 2020). [29][32][36] Moreover, these chemically powered micropumps can be used as sensors for the detection of toxic agents. Absence of the bonding layer allows definition of the vertical pump design parameters. Non-mechanical pumps function with electro-hydrodynamic, electro-osmotic, electrochemical [14] or ultrasonic flow generation, just to name a few of the actuation mechanisms that are currently studied. Simulation results of flow rates through cross sections 66 and 88 are viewed regarded as the flow rates through the side passage and the middle passage, respectively. FiguresA1A8 represent the actual movement of fluid in a pumping cycle. Bio-inspired applications include a flexible electromagnetic micropump using magnetorheological elastomer to replace lymphatic vessels. We know that 1.5mm is the minimum characteristic length of tubes to obtain a better physical model through 3D printing. Dimensional parameters of VPMGRF. Note that the below text is very incomplete in terms of providing a good overview of the different micropump types and applications, and therefore please refer to good review articles on the topic.[3][5][6][7]. However, when the vibrator was powered off after 60 s, the liquid in the left beaker began to flow back to the right on account of the liquid level differential pressure. [19] The compression ratio of Fraunhofer EMFT micropumps reaches the value of 1, which implies self-priming capability and bubble tolerance even at challenging outlet pressure conditions. The local energy loss coefficient can be expressed by a matrix as follows: (A1) ii=1122345345,(A1) where i and i are the energy loss coefficients in Part i in the expanding direction and in the contracting direction, respectively. While positive voltage vice versa drives the diaphragm down, which results in overpressure opening outlet valve and forcing the fluid out of the chamber. In order to prove the double-loop tubes function of rectification, an experiment was carried out as shown in Figure8. Pump C (d=2.5mm) had the maximum value of 4.01mL/min at 9Hz. As there are machining size errors in the actual manufacturing process of the tubes, it is necessary to analyze the stability of the rectification effect when the characteristic length of the cross section changes. First, we marked nine equally spaced points on the upper surface of the vibrator as shown in Figure9. Thus, the variation in pressure amplitude with respect to frequency and voltage could be obtained as shown in Figure18. During the pumping process, the kinetic energy of the vibrator will translate into the kinetic energy of the fluid due to the fluidstructure interaction. With an increase in the cross-sectional area, the flow resistance decreases and the flow resistance difference narrows; hence, the net flow rate will decrease. Figure 18. The above phenomenon indicates that VPMGRF can overcome the reflux and drive the fluid flow towards the left. Their miniaturized overall size, potential cost and improved dosing accuracy compared to existing miniature pumps fuel the growing interest for this innovative kind of pump. No potential conflict of interest was reported by the author(s). Micro Pumps for Infusion/Drug Delivery Systems, Reagent-Prefillable Disposable Fluidic System, Manually Adjustable Low Pulsation Micro Pump Unit, Micro Pumps for Infusion/Drug Delivery System, Piezoelectric Micro Pump - Built-In Driver-Type, COC (Cyclic Olefin Copolymer) or EPDM (Ethylene Propylene Diene Monomer), Piezoelectric Micro Pump - Large Flow Type. In order to get in touch with us, please feel free to use our contact form. The silicon carbide powders (marked with the arrows) in the side passage increased as the flow time went on, which indirectly proves that the fluid in the contracting direction flowed through the middle passage. On the other hand, there are several sharp edges at the bifurcation sections. flow rate 8 ml/min & typ. Therefore, two beakers were placed at a certain height difference and the liquid could be driven through the double-loop tube by the liquid level difference of h. There is no metal in the wetted materials. / Within the microfluidic world, physical laws change their appearance. Eventually, experiments were designed to successfully prove the flow characteristics of the double-loop tubes, and the output performances of micropumps were tested. V As a result, the simulation of the flow field in different directions was obtained as shown in Figure3. 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Our micropumps can be used in many different ways in medical and analytical technology, mechanical engineering, space research and many other applications. Silicon micropumps at Fraunhofer EMFT are manufactured by silicon micromachining technology. The upper surface of the pump chamber is covered by a piezoelectric vibrator. By combining Equations (13)(16), the following conclusions can be drawn: (17) Q=2r2(1/2)(E)(1/2)|ce|(1/2).(17). The structural parameters of the vibrator are shown in Table5. by means of portable devices within telemedicine programs. A novel valve-less piezoelectric micropu . 2. Pump A (d=1.5mm) and Pump B (d= 2.0mm) had the maximum net flow rate of 5.19 and 4.77mL/min, respectively, at 8Hz. Together, the micropump is a small miracle of use for the most diverse applications. Takasago Electric, Inc. All Rights Reserved. In the transfer process of the three physical quantities, there are some transfer functions, such as pure time delay element, integration loop, differentiation loop, etc., which make the phase-frequency characteristics change. In order to eliminate the influence of the height difference on the output performance of VPMGRFs, performance tests were carried out under the initial conditions of zero back pressure. Moreover, Figure14(b, d) are the measurement results, which varied with voltage under a fixed frequency corresponding to the maximum flow rate. Since under these conditions the eye loses its ability to ensure outflow or production of aqueous humour, the implanted micropump developed by Fraunhofer EMFT with the flow rate of 30 l/s facilitates proper flow of the fluid without restricting or creating any inconvenience to the patient. Figure 9. The micropumps are offered individually and in evaluation sets. The micropumps in Bartels mp6 series are miniaturized double diaphragm pumps. When AC excitation was applied to the vibrator, the liquid in the right beaker began to flow along the silicone tube towards the left beaker and the reading on the precision balance gradually increased. The Piezoelectric Pump is a thin, compact, and lightweight diaphragm micro-pump which has been specifically designed for space-conscious built-in applications. The functional principle of Bartels micropumps is based on a piezoelectric diaphragm in combination with passive check valves. Due to the internal friction of the fluid, there will be energy loss as the fluid flows through double-loop tubes. Added to this is particle tolerance down to a particle size of 40 m and good temperature resistance. According to the continuity of fluid, the increasing reading on the precision balance proved that the pump directed the fluid on the right to the left. In addition, the trends of net flow rate curves were similar to those of amplitude curves in Figure14. Micropump can advance remote diagnostic and monitoring of gastrointestinal tract and pulmonary diseases, diabetes, cancer etc. The actuator provides power for the fluid and the valve body plays a diversion role, so as to achieve unidirectional fluid pumping. As the vibrator deforms, a volume change will occur in the pump chamber. A piezo ceramic mounted on a coated brass membrane is deformed when voltage is applied. [42] This is explained by the fast convection that takes place when micropump drives the air towards the sensor, while in absence of the micropump due to slow diffusion sensor response is delayed for several minutes. On the one hand, the amplitude curves varied and the vibrator frequency curves approximated a parabola that first increases and then decreases. In addition, fluid in the double-loop tube was driven by the pressure difference between the inlet and outlet, which was regarded as incompressible flow. Then the outlet was connected to another beaker over a precision balance to measure the net flow rate under zero back pressure. For the latter micropumps are required to ensure accurate delivery and flow of gases. Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine. We aim to offer you the best products possible, should this on any occasion not be the case, do not hesitate to contact us! back pressure 150 mbar @300 Hz, 250 Vpp, SRS signal. Results of rectification between different groups of double-loop tubes. However, it flows through the middle passage in the contracting direction. Micro 3D Perfusion Culture System Gas bubbles within chamber hinder micropump operation as due to the damping properties of the gas bubbles the pressure peaks (P) in the pump chamber decreases, while due to the surface properties the critical pressure (Pcrit) that opens passive valves increases. The pump bodies were made of transparent photosensitive resin by SLA (Stereo lithography Apparatus), as shown in Figure7. Considerable reduction of the dead volume resulted from predeflected actuators along with shallow fabricated pump chamber heights increases the compression ratio. Each micropump is run by two piezo actuators. Figure 7. 1900 West Park Drive, Suite 280, [40], Micropumps have potential industrial applications, such as delivery of small amounts of glue during manufacturing processes, and biomedical applications, including portable or implanted drug delivery devices. [30][37], Another class of non-mechanical pumping is light-powered pumping. The membrane is then lowered, expelling the fluid through the outlet valve. The flow characteristics among different lengths is almost consistent when the fluid flows in the contracting direction.

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